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project info
Start date: 30 September 2015
End date: 31 December 2018
funding
Fund: European Regional Development Fund (ERDF)
Total budget: 23 990 324,80 €
EU contribution: 19 192 259,84 € (80%)
programme
Programming period: 2014-2021
Managing authority: Sächsisches Staatsministerium für Wirtschaft, Arbeit und Verkehr, Referat 28

Clean room extension for research on MEMS and NEMS sensor actuator systems to 200 mm wafer substrates at the Fraunhofer Institute for Photonic Microsystems (IPMS) in Dresden

Clean room extension for research on MEMS and NEMS sensor actuator systems to 200 mm wafer substrates at the Fraunhofer Institute for Photonic Microsystems (IPMS) in Dresden

Flag of Germany  Dresden, Germany